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Why ESI ESI is an industry leader in Gasonics Asher deployment
ESI focus is Gasonics L3510 systems replacement parts and upgrades
ESI has been in the Semiconductor tool business over 21 years
Warranties up to one year, installation/start-up, spare parts and training
ESI has a Class 100 certified cleanroom
Systems can be fully demonstrated in our facility
Local ESI support in the U.S.
Support offered through our partners in China, Taiwan, Korea and Europe
ESI offers upgrades for obsolete Gasonics components to state of the art
Systems are remanufactured to meet or exceed original OEM specifications
ESI uses only the highest quality parts
a I 68 hr (6 ma after sign-off), 300 hr. goal (I? ma after sign-off) .36 hr. <3 hr. for 80% of all downs <5 min: 89-95% (Equip. Dependent Uptime: must meet specific support ieciurrements) 3-8 inch/75mm -200mm 30" (762 mm) W x 38" (965mm) D x 58" (1473mm) H 200--240 VAC, 3 Phase, 50/60 Hz. WYE configuration, 40 Amp. breaker 0,, N,/H,, N)- regulated I8-23 23 PSIG Refer to:"L35 I 0 Facility interface Matrix"- 17642-01
Note-Due to the complexity of customers' process variations and requirements, the above process performance specification can deviate or be improved.Therefore. customers should submit demo samples to the Application's Lab via their sales person to establish the optimum applicable specifications and conditions. Actual numbers on reliability mill depend upon specific support available through contracts, knowledge of people performing PM. and sufficient consumables and spare parts, on site,
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Evergreen Solutions Inc. |
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