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Why ESI

ESI is an industry leader in Gasonics Asher deployment

 

ESI focus is Gasonics L3510 systems replacement parts and upgrades

 

ESI has been in the Semiconductor tool business over 21 years

 

Warranties up to one year, installation/start-up, spare parts and training

 

ESI has a Class 100 certified cleanroom

 

Systems can be fully demonstrated in our facility

 

Local ESI support in the U.S.

 

Support offered through our partners in China, Taiwan, Korea and Europe

 

ESI offers upgrades for obsolete Gasonics components to state of the art

 

Systems are remanufactured to meet or exceed original OEM specifications

 

ESI uses only the highest quality parts

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

a I 68 hr (6 ma after sign-off), 300 hr. goal (I? ma after sign-off) .36 hr.

<3 hr. for 80% of all downs

<5 min:

89-95% (Equip. Dependent Uptime: must meet specific support ieciurrements)

3-8 inch/75mm -200mm

30" (762 mm) W x 38" (965mm) D x 58" (1473mm) H 200--240 VAC, 3 Phase, 50/60 Hz.

WYE configuration, 40 Amp. breaker

0,, N,/H,, N)- regulated I8-23 23 PSIG

Refer to:"L35 I 0 Facility interface Matrix"- 17642-01

 

Note-Due to the complexity of customers' process variations and requirements, the above process performance specification can deviate or be improved.Therefore. customers should submit demo samples to the Application's Lab via their sales person to establish the optimum applicable specifications and conditions. Actual numbers on reliability mill depend upon specific support available through contracts, knowledge of people performing PM. and sufficient consumables and spare parts, on site,

CaSorrics International 2730 jumitio6 Avenue San lose CA 95131-1909 408-961-02 I                 408-473-9309 1.195

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Evergreen Solutions Inc.

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