Evergreen Solutions Inc.

Gasonics P/N

Rev #

DESCRIPTION

73789-04

Lamp, HG-Ozone Free, 2.125"

17060-01

PWR SPLY,HG LAMP,120 VAC

73325-02

Lamp, Halogen, 120VAC, 1000W

95-0517

M

Pentium M CPU PCB ( updated version )

15451-01

Press/EOP PCB

16495-01

I/O PCB also works with Newset  version software 7.5

15869-01

EOP assembly box with PCB

16924-01

E

LCD Video Monitor, replaces plasma display, ESI

15158-01

Membrane Keypad

94-1140

PS1 130W +5,-5,+12,-12

73870-01

PS2 155W +5,+15,-15,+24

61-0022

PS3 130W +5,-5,+12,-12

911566

Microwave Generator, AGL 139 type

912224

waveguide assembly

94-1112

3 stub microwave tuner assembly

16092-99

Platen

23-0071

MFC 4 SLM O2

232-0075

MFC 500 Sccm N2

73313-03

Filter, Gas, .01M - Inline

22-0138

ISO Valve, Low profile

73727-01

Door Cylinder

73340-02

Hall Effect Sensor

15382-01

Lifter Cylinder

95-0253-01

Lifter Sensor

73019-01

ATM Sensor

73029-02

MKS, XDUCER,VAC-10 TORR,1/2T,W/VCR

22-0201-02

MKS, Throttle Valve pressure controller

70963-06

10 port pneumatic valve assembly with FPL-M3 & FTS4-M3

001-0000-41

Zbot 2 robot, Brooks style ( no driver pcb )

001-1070-02

Zbot Controller PCB

15784-01

RF filter assembly

17105-01

CASSETTE PLATFORM ASSEMBLY

150-100001-001

12

LCD display upgrade kit, converts from obsolete style to new LCD

93-00152A

B

Quartz chamber with bubbler attached

e-10-2415

Lamp controller from analog to solid state, eliminates need for adjustments

e-4p

pnewmatic air manifold block, easy access