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Tool Sales, Installation, and Service
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Process tool Installations
Tool Sales
Contract Equipment Engineering
Time and Material Service Agreements
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Complete tool refurbishment and retrofits
Field Service Support Contracts
Reliability Improvement Programs
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Examples of tools we have serviced:
Applied Materials 8000 and 5000 series; Lam Alliance 9400 DFM; Lam Rainbow 4520, 4400, 4700; Mattson Aspen II, Gasonics 3500; Lam Auto Etch 490, 590; Matrix 105; Acellis Microlite UV; Tegal 900 and 800; Drytek Megastrip; MTC coat tracks
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Materials Recycling
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Vacuum Pump and Chiller Services, including:
- PFPE Pump Fluids Sales and Recycling
(Krytox and Fomblin )
- Galden and Flourinert Sales and Recycling
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Post Start-Up Support
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ESI Offers:
- Equipment warranty and or equipment service contracts
- On-site training for both maintenance procedures and troubleshooting
- Reliability improvement programs to assist customers in maximizing the performance of their systems
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