About ESI

ESI has been in business since 1986 working with Plasma Etchers and Ashers. Offering services and technical support in Semiconductor, MEMS, Biomedical, Nanotechnology & LED industries. We have become the industry leader in remanufactured Gasonics L3510 Asher equipment.


To achieve this, we have been providing unique innovative upgrades and cost-effective technical solutions, high-quality equipment and on-time spare parts delivery worldwide. We have maintained a global presence that has grown and expanded into the major high-tech manufacturing areas of the world.


We understand that timely responsive support and outstanding service are critical.


ESI’s experienced engineer team is the best guarantee for high-quality service and support. We provide on-site installation, training, maintenance, system optimization, retrofits, and customized upgrades.


We manufacture and test all our products in our Class 100 certified cleanroom.


The ESI e3511, e105, e106, e303, e590, e490 were developed to replace these older obsolete product lines with new PC, Software and robotics but still process compatible. This reduces customer product qualification time required for new process-based tools.
The New ESI developed e3611and 3612 Plasma Ashers bring High Throughput and Low Cost of Ownership with Small Footprint


All of our equipment goes through a series of rigorous full process tests that are documented, standardized, and certified by performance and reliability standards to ensure the highest quality. All our systems and subsystems are manufactured in the USA using all new parts. Our existing customers always come back to us because of the high quality and outstanding customer service we provide.

Our Mission

Our mission is to provide unique Innovation for Optimized Equipment Performance. We’re dedicated to finding solutions that increase yield, improve uptime, reduce maintenance costs, the lower overall cost of ownership and extend the life cycle of your equipment.

Why choose ESI

  • ESI has been in the semiconductor equipment industry Since 1986.

  • ESI remanufactured systems exceed original OEM specifications.

  • ESI is an industry leader in Gasonics L3510 Asher deployment

  • Upgrades for obsolete Gasonics L3510, Matrix 105, Matrix 303

  • Full process testing in our facility

  • 1 yr Warranty

  • Installation/start-up

  • Spare parts and training

  • Local ESI support in the U.S.

  • Support offered in Asia and Europe with our Distributers

ESI  |  11210 W. Hwy 290, Suite B150, Austin TX 78737  |  (512) 582-0622  | 1-800-338-0520 fax | sales@ESI-semi.com

© 2020 ESI