Matrix Ashers

e105 / e106 Wafer Ashing Systems

The e105 Single Wafer Asher not only serves as a direct replacement to the Matrix 105, but the ESI e105 also brings many new features and enhancements that improve throughput, process monitoring, and cost of ownership.

Features:
  • Direct Replacement for the Matrix 105/106

  • Improved Control Hardware

  • New Hine Robot

  • New PC, Win7 running Enhanced IDX Flexware® Software

  • Intuitive HMI Touchscreen

  • SMART Pressure Control

  • New SLICE I/O Modules

  • Solid State Controller for Chuck Heater

  • New AE Fast RF Match

  • Easy Access Pneumatic Settings

 
e303 Single Wafer Etching System

To replace the Matrix 303 ESI developed the e303, a completely new and improved Single Wafer Etching System, it also brings many new features and enhancements that improve throughput, process monitoring, and cost of ownership.

Features:
  • Direct replacement for the Matrix 303

  • Single Chamber Processing

  • Improved Control Hardware

  • New Hine Robot

  • New SMART VAT Valve

  • New PC, Win7 running Enhanced IDX Flexware® Software

  • Intuitive HMI Touchscreen

  • SMART Pressure Control

 
ESI  |  11210 W. Hwy 290, Suite B150, Austin TX 78737  |  (512) 582-0622  | 1-800-338-0520 fax | sales@ESI-semi.com

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