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Gasonics L3510 Upgrades

Since 1986, ESI has provided Plasma Asher systems and support.

The Gasonics L3510 has reached end-of-life status.

This means most replacement parts are no longer manufactured, and ongoing technical support is very limited.
 

The good news is that we have a direct, modern replacement—the e3511 is fully compatible with your existing L3510 and offers significant improvements, including:

  • Higher performance and reliability, updated features, and better efficiency using HSMS Secs/GEM, ethernet controlled robot, and a Smart pressure control valve

  • Full warranty and ongoing technical support

  • Lower long-term maintenance costs

ESI, Semiconductor, Wafer, Asher

Improved reliability
and performance

Test / Qualifications

  • Test & Qualification

  • Configured to customer specification

  • Demonstrated at ESI prior to ship

  • Full Process 1000 wafers using plasma without error

  • No wafer radiation damage during test

Applications

  • Bulk Resist, Post LDI Resist Strip, Polymer Removal

  • Descum processing

  • Surface treatment for better Dep Adhesion

  • Post high dose implant strip

  • Oxidation

  • Isotropic etch

  • MEMS Applications

Process / Control Enhancements

  • ​Single cassette processing

  • True Downstream Microwave plasma processing

  • Automatic photoemission end-point detection

  • Calibrated Microwave system

  • Calibrated Pressure system

  • Calibrated Temperature Control system

Gasonics, ESI, Semiconductor, Wafer, Asher
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