Lam 490/480
e105 / e106 Wafer Ashing Systems
The e105 Single Wafer Asher not only serves as a direct replacement to the Matrix 105, but the ESI e105 also brings many new features and enhancements that improve throughput, process monitoring, and cost of ownership.
Features:
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Direct Replacement for the Matrix 105/106
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Improved Control Hardware
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New Hine Robot
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New PC, Win7 running Enhanced IDX Flexware® Software
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Intuitive HMI Touchscreen
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SMART Pressure Control
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New SLICE I/O Modules
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Solid State Controller for Chuck Heater
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New AE Fast RF Match
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Easy Access Pneumatic Settings
e303 Single Wafer Etching System
To replace the Matrix 303 ESI developed the e303, a completely new and improved Single Wafer Etching System, it also brings many new features and enhancements that improve throughput, process monitoring, and cost of ownership.
Features:
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Direct replacement for the Matrix 303
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Single Chamber Processing
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Improved Control Hardware
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New Hine Robot
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New SMART VAT Valve
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New PC, Win7 running Enhanced IDX Flexware® Software
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Intuitive HMI Touchscreen
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SMART Pressure Control